Reference state comes first
A recipe cannot be transferred cleanly unless the source line has a known reference state. Chamber health, tool constants, metrology offsets, and maintenance history need to be frozen before the move begins.
The destination line is then qualified against that reference, not against an abstract equipment specification.
Small offsets deserve attention
Copy-exact programs fail slowly when small offsets are accepted as harmless. Those offsets compound across critical layers and can surface as yield loss weeks later.
SILICON uses SPC marathons and module-specific matching gates to force those offsets into review while the transfer is still reversible.
Sustaining keeps the match alive
The transfer is not finished when the first wafer passes. The match has to be sustained through PM events, consumable changes, chamber cleans, and recipe updates.
That is why customer engineering, sustaining, and metrology teams stay connected after sign-off.
